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Volumn 170, Issue 4, 1999, Pages 175-179
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Sub-nanometer metrology of chirped phase masks by optical Moire
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Author keywords
[No Author keywords available]
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Indexed keywords
ELECTROMAGNETIC FIELD MEASUREMENT;
ELECTROMAGNETIC WAVE DIFFRACTION;
CHIRPED PHASE MASKS;
OPTICAL MOIRE;
LIGHT PROPAGATION;
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EID: 0033349156
PISSN: 00304018
EISSN: None
Source Type: Journal
DOI: 10.1016/S0030-4018(99)00461-7 Document Type: Article |
Times cited : (4)
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References (9)
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