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Volumn 170, Issue 4, 1999, Pages 175-179

Sub-nanometer metrology of chirped phase masks by optical Moire

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMAGNETIC FIELD MEASUREMENT; ELECTROMAGNETIC WAVE DIFFRACTION;

EID: 0033349156     PISSN: 00304018     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0030-4018(99)00461-7     Document Type: Article
Times cited : (4)

References (9)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.