Effect of (La,Sr)CoO3 seed layer on the reliability of Pb(Zr,Ti)O3 capacitors

Integrated Ferroelectrics

Volumn 25, Issue 1-4, 1999, Pages 341-350

  Han, Geun Jo ^a   Yang, Cheol Woong ^a   Lee, Jaichan ^a  

^a Sungkyunkwan University   (South Korea)

Author keywords

(La; Sr)CoO3; Fatigue; Memory; PZT thin film; Seed layer

Indexed keywords

CAPACITORS; DEPOSITION; FATIGUE OF MATERIALS; FILM GROWTH; LANTHANUM COMPOUNDS; PEROVSKITE; PHASE COMPOSITION; PULSED LASER APPLICATIONS; RELIABILITY; THICKNESS MEASUREMENT;

LEAD ZIRCONIUM TITANATE; PYROCHLORE; SEED LAYER;

THIN FILMS;

EID: 0033345420     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584589908210184     Document Type: Article

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