Effect of RuO2/Pt hybrid bottom electrode structure on the microstructure and ferroelectric properties of sol-gel derived PZT thin films

Materials Research Society Symposium - Proceedings

Volumn 493, Issue , 1998, Pages 131-136

  Kim, S H ^a   Hong, J G ^a   Gunter, J C ^a   Lee, H Y ^a   Streiffer, S K ^a   Kingon, A I ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COERCIVE FORCE; ELECTRIC BREAKDOWN; LEAKAGE CURRENTS; MICROSTRUCTURE; SOL-GELS; THIN FILMS; TITANIUM COMPOUNDS;

FERROELECTRIC MATERIALS;

EID: 0031651537     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)