S-shaped magnetic macroparticle filter for cathodic arc deposition

International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV

Volumn 2, Issue , 1996, Pages 904-908

  Anders, Simone ^a   Anders, Andre ^a   Dickinson, Michael R ^a   MacGill, Robert A ^a   Brown, Ian G ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; CARBON; CATHODES; DEPOSITION; ELECTRON TRANSPORT PROPERTIES; MAGNETIC FIELDS; PERFORMANCE; PLASMA SOURCES; PROBES; QUANTUM EFFICIENCY;

CATHODIC ARC DEPOSITION; LANGMUIR PROBES; S SHAPED MAGNETIC FILTERS;

MAGNETIC FILTERS;

EID: 0029713684     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (17)