Microstructure of c-BN films deposited by IBAD: IR and HREM analyses

Materials Research Society Symposium - Proceedings

Volumn 472, Issue , 1997, Pages 173-178

  Ilias, S ^a   Pascallon, J ^a   Stambouli, V ^a   Bouchier, D ^a   Nouet, G ^a  

^a UNIVERSITÉ PARIS SACLAY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL MICROSTRUCTURE; DEPOSITION; ELECTRON MICROSCOPY; INFRARED TRANSMISSION; INTERFACES (MATERIALS); ION BEAMS; MORPHOLOGY; REACTIVE ION ETCHING; SUBSTRATES; THIN FILMS;

ION BEAM ASSISTED DEPOSITION (IBAD); ION ENERGIES; PHASE CONCENTRATION;

SEMICONDUCTING FILMS;

EID: 0031359059     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-472-173     Document Type: Conference Paper

References (13)