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EPJ Applied Physics

Volumn 8, Issue 2, 1999, Pages 139-145

Fabrication of co-planar metal-insulator-metal solid state nanojunctions down to 5 nm

(4) Cholet, S a Joachim, C a Martinez, J P a Rousset, B b

a CEMES CNRS (France)

b LAAS CNRS (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAM LITHOGRAPHY; FABRICATION; INTERFACES (MATERIALS); NANOTECHNOLOGY; POLYMETHYL METHACRYLATES; SEMICONDUCTOR JUNCTIONS; SILICA; SILICON; STATISTICAL METHODS;

NANOJUNCTIONS;

MIM DEVICES;

EID: 0033341712 PISSN: 12860042 EISSN: None Source Type: Journal
DOI: 10.1051/epjap:1999239 Document Type: Article

Times cited : (23)

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