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Volumn 116-119, Issue , 1999, Pages 327-334
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Characterisation of TiN and carbon-doped chromium thin film coatings by acoustic microscopy
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Author keywords
Acoustic microscopy; C doped chromium; In depth imaging; Thin film elastic modulus; Thin films; TiN
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Indexed keywords
ACOUSTIC MICROSCOPES;
ANISOTROPY;
CARBON;
CHROMIUM;
CRYSTAL MICROSTRUCTURE;
DOPING (ADDITIVES);
ELASTIC MODULI;
GRAIN BOUNDARIES;
POISSON RATIO;
STRESS ANALYSIS;
THIN FILMS;
TITANIUM NITRIDE;
IN-DEPTH IMAGING;
METALLIC FILMS;
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EID: 0033338781
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(99)00316-3 Document Type: Article |
Times cited : (16)
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References (26)
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