Design and development of 3-dimensional process simulator

IEICE Transactions on Electronics

Volumn E82-C, Issue 6, 1999, Pages 839-847

  Wada, Tetsunori ^a   Kotani, Norihiko ^a  

^a SEMICONDUCTOR LEADING EDGE TECHNOLOGIES INC   (Japan)

Author keywords

Design; File format; Process simulator; Semiconductor

Indexed keywords

C (PROGRAMMING LANGUAGE); COMPUTER SIMULATION; COMPUTER SOFTWARE; DATABASE SYSTEMS; PARTIAL DIFFERENTIAL EQUATIONS; SEMICONDUCTOR DEVICE MODELS; THREE DIMENSIONAL;

FILE FORMAT; SEMICONDUCTOR PROCESS SIMULATOR;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0033337159     PISSN: 09168524     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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