Growth and investigation of SiGe films on buried Ge islands

Journal of Crystal Growth

Volumn 206, Issue 4, 1999, Pages 294-298

  Huang, Jingyun ^a   Ye, Zhizhen ^a   Chen, Weihua ^a   Qi, Zhen ^a   Lu, Huanming ^a   Lei, Wang ^a   Zhao, Binghui ^a   Que, Duanlin ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; GERMANIUM; RELAXATION PROCESSES; SEMICONDUCTING FILMS; SEMICONDUCTING SILICON COMPOUNDS; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY; X RAY CRYSTALLOGRAPHY;

BUFFERS; ULTRAHIGH VACUUM CHEMICAL VAPOR DEPOSITION;

CRYSTAL GROWTH;

EID: 0033328508     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(99)00338-3     Document Type: Article

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