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Volumn , Issue 59, 1997, Pages
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Vapour deposited silicon carbide
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Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
CRYSTAL MICROSTRUCTURE;
DISSOLUTION;
ELECTRIC CONDUCTIVITY OF SOLIDS;
GRAIN SIZE AND SHAPE;
HARDNESS;
POLYCRYSTALLINE MATERIALS;
SUBSTRATES;
SURFACE MEASUREMENT;
SURFACE ROUGHNESS;
THERMAL CONDUCTIVITY OF SOLIDS;
THERMAL EXPANSION;
METHYL TRICHLOROSILANE;
POISSON'S RATIO;
SILICON CARBIDE;
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EID: 85087234192
PISSN: 09633308
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1049/ic:19970337 Document Type: Conference Paper |
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Times cited : (1)
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References (0)
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