Multispecies step-flow model of growth of compound thin films by MOCVD

Thin Solid Films

Volumn 357, Issue 1, 1999, Pages 26-30

  Jabbour, M ^a   Bhattacharya, K ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL GROWTH; FILM GROWTH; MATHEMATICAL MODELS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; OXIDE SUPERCONDUCTORS; PHASE COMPOSITION; REACTION KINETICS; STOICHIOMETRY;

STEP FLOW;

SUPERCONDUCTING FILMS;

EID: 0033323443     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)00469-1     Document Type: Article

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