Transport phenomena in chemical mechanical polishing

Journal of the Electrochemical Society

Volumn 146, Issue 11, 1999, Pages 4263-4272

  Subramanian, R Shankar ^a   Zhang, Lu ^a   Babu, S V ^a  

^a Clarkson University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; IRON COMPOUNDS; MATHEMATICAL MODELS; METALLIC FILMS; NITRATES; SUBSTRATES;

CHEMICAL MECHANICAL POLISHING (CMP);

CHEMICAL POLISHING;

EID: 0033322001     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1392626     Document Type: Article

References (28)

1. G. Nanz and L. E. Camilletti, IEEE Trans. Semicond. Manuf., SM-8, 382 (1995).
2. L. M. Cook, J. Non-Cryst. Solids, 120, 152 (1990).
3. F. Preston, J. Soc. Glass Technol., 11, 214 (1927).
4. S. R. Runnels and L. M. Eyman, J. Electrochem. Soc., 141, No. 6, 1698 (1994).
5. O. Reynolds, Philos. Trans. Roy. Soc., A177, 157 (1886).
6. S. R. Runnels, J. Electrochem. Soc., 141, 1900 (1994).
7. D. P. Y. Bramono and L. M. Racz, in Proceedings of the CMP-MIC Conference, p. 185, San Diego, CA (1998).
8. S. Sundararajan, D. G. Thakurta, D. W. Schwendeman, S. P. Murarka, and W. N. Gill, J. Electrochem. Soc., 146, 761 (1999).
9. J. A. Levert, A. R. Baker, F. M. Mess, R. F. Salant, and S. Danyluk, in Proceedings of the World Tribology Congress, London (1997).
10. J. Tichy, J. A. Levert, L. Shan, and S. Danyluk, J. Electrochem. Soc., 146, 1523 (1999).
11. J. Coppeta, L. Racz, A. Philipossian, F. Kaufman, and C. Rogers, in Proceedings of the CMP-MIC Conference, p. 36. San Diego, CA (1998).
12. M. Bhushan, R. Rouse, and J. E. Lukens, J. Electrochem. Soc., 142, 3845 (1995).
13. M. Fayolle, J. F. Lugand, F. Weimar, and W. Bruxvoort, in Proceedings of the CMP-MIC Conference, p. 128, San Diego, CA (1998).
14. W. J. Patrick, W. L. Guthrie, C. L. Standby, and P. M Schiable, J. Electrochem. Soc., 138, 1778 (1991).
15. L-J. Chen, Y-L. Huang, Z-H. Lin, and H-W. Chiou, in Proceedings of the CMP-MIC Conference, p. 28, San Diego, CA (1998).
16. R. B. Bird, W. E. Stewart, and E. N. Lightfoot, Transport Phenomena, Wiley, New York (1960).
17. S. V. Patankar, Numerical Heat Transfer and Fluid Flow, Hemisphere Publishing, Washington (1980).
18. C. A. J. Fletcher, Computational Techniques for Fluid Dynamics, Vol. 1 and 2, Springer-Verlag, Berlin (1991).
19. N. J. Brown, P. C. Baker, and R. T. Manley, Contemporary Methods of Optical Fabrication, Vol. 306, SPIE, p. 42 (1981).
20. N. J. Brown and L. M. Cook, Tub-A3, in Technical Digest, Proceedings of the Topical Meeting on the Science of Polishing, Optical Society of America, April 1984.
21. C-W. Liu, B-T. Dai, W-T. Tseng, and C-F. Yeh, J. Electrochem. Soc., 143, 716 (1996).
22. D. W. Peaceman and H. H. Rachford, J. Soc. Ind. Appl. Math., 3(1), 28 (1955).
23. P. N. Shankar, J. Fluid Mech., 250, 371 (1993).
24. S. Ramarajan and S. V. Babu, Unpublished results.
25. CRC Handbook of Chemistry and Physics, CRC Press, OH (1975).
26. F. B. Kaufman, D. B. Thompson, R. E. Broadie, M. A. Jaso, W. L. Guthrie, D. J. Pearson, and M. B. Small, J. Elevtrochem. Soc., 138, 3460 (1991).
27. J. M. Steigerwald, S. P. Murarka, J. Ho, R. J. Gutmann, and D. J. Duquette, J. Vac. Sci. Technol., 13, 2215 (1995).
28. J. M. Steigerwald, S. P. Murarka, R. J. Gutmann, and D. J. Duquette, Mater. Chem. Phys., 41, 217 (1995).