A 2-MHz 6-kVA voltage-source inverter using low-profile MOSFET modules for low-temperature plasma generators

IEEE Transactions on Power Electronics

Volumn 14, Issue 6, 1999, Pages 1014-1020

  Fujita, Hideaki ^a,b   Akagi, Hirofumi ^a,b   Shinohara, Shin Ichi ^a,c  

^a IEEE   (Japan)

^b OKAYAMA UNIVERSITY   (Japan)

^c Origin Electric Co Ltd   (Japan)

Author keywords

Device packaging; High frequency inverter; Low temperature plasma; Power MOSFET; Stray inductance

Indexed keywords

MOSFET DEVICES; POWER ELECTRONICS;

HIGH FREQUENCY INVERTERS; PLASMA GENERATORS; STRAY INDUCTANCE;

ELECTRIC INVERTERS;

EID: 0033312118     PISSN: 08858993     EISSN: None     Source Type: Journal    
DOI: 10.1109/63.803394     Document Type: Article

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