Opto-electronic displacement gauge based on speckle interferometer

Optics and Lasers in Engineering

Volumn 32, Issue 1, 1999, Pages 65-77

  Wronkowski, Leszek ^a   Tkaczyk, Tomasz ^a   Olszak, Artur ^b  

^a WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

^b Veeco Metrology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; DISTANCE MEASUREMENT; INTERFEROMETERS; OPTOELECTRONIC DEVICES; SPECKLE; SURFACE ROUGHNESS;

OPTOELECTRONIC DISPLACEMENT GAUGES; SPECKLE INTERFEROMETERS;

GAGES;

EID: 0033309106     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0143-8166(99)00042-1     Document Type: Article

References (17)

1. Rigden J.D., Gordon E.I. Proc. IRE. 50:1962;2367.
2. Olivier B.M. Proc IEEE. 51:1963;220.
3. Goodman J.W. Proc IEEE. 53:1965;1688.
4. Goodman J.W. Statistical properties of laser speckle patterns. Dainty J.C. Laser speckle and related phenomena. 1975;Springer, Berlin.
5. Sirohi R.S. Speckle metrology. 1993;Marcel Dekker Inc. New York.
6. Jones R., Wykes C. Holographic and speckle interferometry. 1989;Cambridge University Press, Cambridge.
7. Brown G.C., Pryputniewicz R.J. Experimental and computational determination of dynamic characteristics of microbeam sensors. Proc SPIE. 2545:1995;108-119.
8. Malmo J.T., Vikhagen E. Vibration analysis of a car body by means of TV holography. Exp Tech. 12:1988;28-31.
9. Bennett J.M., Mattsson Introduction to surface roughness from light scattering measurements. Opt Quant Electron. 9:1977;269-287.
10. Mohon N., Rodemann A. Laser speckle for determining ametropia and accommodation response of the eye. Appl Opt. 12:1973;783.
11. Lokberg O.J., Hogmoen K., Holje O.M. Vibration measurement on the human ear drum in vivo. Appl Opt. 18(6):1979;763-765.
12. Wronkowski L. Theory and applications of opto-electronic incremental displacement gauges. 1990;Warsaw University of Technology, Warsaw.
13. Sekula P, Wronkowski L. Electronic resolution process vs. resolution of measuring and positioning systems, "Transactions on the precision and electronic technology", Proceedings of the 2nd International Seminar in Precision and Electronic Technology, INSEL'95, vol. 2, Warsaw, 1995.
14. Sekula P, Wronkowski L. Digital method of enragmenent of resolution and acurracy of the optoelectronic measuring systems In: Proceedings of the 11th European Conference on Solid-State Transducers. Warsaw: EUROSENSORS XI, 1997.
15. Wronkowski L. Fresnel images of a binary diffraction gratin with open ratio less than 0.5. J Modern Opt. 34(8):1987.
16. Wronkowski L. Fresnel images of a binary diffraction gratin with open ratio 0.5. J Modern Opt. 35(8):1987.
17. Olszak A., Wronkowski L. Analysis of Fresnel field of double diffraction system in case of two amplitude binary gratings in partially coherent illumination. Opt Eng. 36(8):1997;2149-2157.