SCOPUS 정보 검색 플랫폼

Materials Research Society Symposium - Proceedings

Volumn 565, Issue , 1999, Pages 211-216

Preparation and characterization of high porosity SiO2 xerogels for low k dielectrics

(1) Colomer, M T a,b

a UNIVERSITY OF WISCONSIN MADISON (United States)

b INSTITUTO DE CERÁMICA Y VIDRIO (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; CALCINATION; CHARACTERIZATION; DIELECTRIC MATERIALS; HIGH TEMPERATURE OPERATIONS; NITROGEN; ORGANIC POLYMERS; PERMITTIVITY; PERMITTIVITY MEASUREMENT; POROUS MATERIALS; SOL-GELS; X RAY DIFFRACTION ANALYSIS;

INTERMETAL DIELECTRIC FILM; NITROGEN ADSORPTION MEASUREMENT; XEROGELS;

SILICA GEL;

EID: 0033300358 PISSN: 02729172 EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Article

Times cited : (4)

References (14)

1
- 0027623448
- L.W. Hrubesh, L.E. Keene and V.R. Latorre, J. Mater. Res. 8 (1993) 1736.
- (1993) J. Mater. Res. , vol.8 , pp. 1736
- Hrubesh, L.W.¹ Keene, L.E.² Latorre, V.R.³

2
- 34247505686
- L.W. Hrubesh and J.F. Poco, J. Non-Cryst. Solids 188 (1995) 46.
- (1995) J. Non-cryst. Solids , vol.188 , pp. 46
- Hrubesh, L.W.¹ Poco, J.F.²

3
- 0029205735
- D.M. Smith, J. Anderson, C.C. Cho and B.E. Gnade, Mater. Res. Soc. Symp. Proc. Vol. 371, 1995, pp. 261.
- (1995) Mater. Res. Soc. Symp. Proc. , vol.371 , pp. 261
- Smith, D.M.¹ Anderson, J.² Cho, C.C.³ Gnade, B.E.⁴

4
- 0029408019
- C.C. Cho, D.M. Smith, J. Anderson, Mater. Chem. and Physics 42 (1995) 91
- (1995) Mater. Chem. and Physics , vol.42 , pp. 91
- Cho, C.C.¹ Smith, D.M.² Anderson, J.³

5
- 0001151845
- M-H. Jo, J-K. Hong, H-H. Park, J.L Kim, S-H. Hyun, Microelectronic Engineer. 33 (1997) 343.
- (1997) Microelectronic Engineer. , vol.33 , pp. 343
- Jo, M.-H.¹ Hong, J.-K.² Park, H.-H.³ Kim, J.L.⁴ Hyun, S.-H.⁵

6
- 0031245701
- J-K. Hong, H-S. Yang, M-H. Jo, H-H. Park, S-Y. Choi, Thin Solid Films 308-309 (1997) 495.
- (1997) Thin Solid Films , vol.308-309 , pp. 495
- Hong, J.-K.¹ Yang, H.-S.² Jo, M.-H.³ Park, H.-H.⁴ Choi, S.-Y.⁵

7
- 0342529436
- C.P. Wong (ed.), Academic Press, Boston
- D.J. Monk and D.S. Soane, in C.P. Wong (ed.), Polymers for Electronics and Photonic Applications, Academic Press, Boston, 1993, p. 119.
- (1993) Polymers for Electronics and Photonic Applications , pp. 119
- Monk, D.J.¹ Soane, D.S.²

8
- 0027390769
- C.J. Brinker, T.L. Ward, R. Sehgal, N.K. Raman, S.L. Hietala, D.M. Smith, D.W. Hua and T.J. Heedeley, J. Memb. Sci., 77 (2/3) (1993) 165.
- (1993) J. Memb. Sci. , vol.77 , Issue.2-3 , pp. 165
- Brinker, C.J.¹ Ward, T.L.² Sehgal, R.³ Raman, N.K.⁴ Hietala, S.L.⁵ Smith, D.M.⁶ Hua, D.W.⁷ Heedeley, T.J.⁸

9
- 0025521858
- L.C. Klein and N. Giszpenc, Am. Ceram. Soc. Bull., 69 (1990) 1821.
- (1990) Am. Ceram. Soc. Bull. , vol.69 , pp. 1821
- Klein, L.C.¹ Giszpenc, N.²

10
- 0024680655
- A. Larbot, A. Julbe, C. Guizard and L. Cot, J. Memb. Sci., 44 (1989) 289.
- (1989) J. Memb. Sci. , vol.44 , pp. 289
- Larbot, A.¹ Julbe, A.² Guizard, C.³ Cot, L.⁴

11
- 0028557803
- Materials Research Society
- L. Chu, M.I. Tejedor-Tejedor and M.A. Anderson, Mater. Res. Soc. Symp. Proc. Vol. 346, Materials Research Society, 1994.
- (1994) Mater. Res. Soc. Symp. Proc. , vol.346
- Chu, L.¹ Tejedor-Tejedor, M.I.² Anderson, M.A.³

12
- 0003506516
- Academic Press, New York
- S.J. Gregg and K.S.W. Sing, Adsorption, Surface Area and Porosity (Academic Press, New York, 1982).
- (1982) Adsorption, Surface Area and Porosity
- Gregg, S.J.¹ Sing, K.S.W.²

13
- 84939775172
- K.S.W. Sing, D.H. Everett, R.A.W. Haul, L. Moscou, R.A. Pierotti, J.Y. Rouquerol, T. Siemieniewska, Appl. Chem. 57 (4) (1985) 603.
- (1985) Appl. Chem. , vol.57 , Issue.4 , pp. 603
- Sing, K.S.W.¹ Everett, D.H.² Haul, R.A.W.³ Moscou, L.⁴ Pierotti, R.A.⁵ Rouquerol, J.Y.⁶ Siemieniewska, T.⁷

14
- 84951367014
- S. Henning and L. Svenson, Phys. Scripta, 23 (1981) 697.
- (1981) Phys. Scripta , vol.23 , pp. 697
- Henning, S.¹ Svenson, L.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.