Optical filter for fabricating self-aligned amorphous Si TFTS

Materials Research Society Symposium - Proceedings

Volumn 557, Issue , 1999, Pages 677-682

  Mei, P ^a   Lu, J P ^a   Chua, C ^a   Ho, J ^a   Wang, Y ^a   Boyce, J B ^a  

^a PALO ALTO RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; CAPACITANCE; ELECTRIC CONTACTS; ELECTRONIC STRUCTURE; EXCIMER LASERS; GATES (TRANSISTOR); LIGHT TRANSMISSION; LITHOGRAPHY; OPTICAL FILTERS; RADIATION DAMAGE; SEMICONDUCTOR DOPING; SUBSTRATES;

CONTACT RESISTANCES; DRAIN CONTACTS; GATE ELECTRODE; PULSED EXCIMER LASER;

THIN FILM TRANSISTORS;

EID: 0033300313     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-557-677     Document Type: Article

References (12)

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