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Volumn 557, Issue , 1999, Pages 127-132
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Performance of a-Si-H solar cells at higher growth rates
a a a a a a a
a
Solarex
(United States)
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Author keywords
[No Author keywords available]
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Indexed keywords
CRYSTAL DEFECTS;
DECOMPOSITION;
FILM GROWTH;
HYDROGEN;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
PLASMAS;
SEMICONDUCTOR DOPING;
SHORT CIRCUIT CURRENTS;
SILANES;
SOLAR CELLS;
GROWTH RATES;
PLASMA DECOMPOSITION;
AMORPHOUS SILICON;
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EID: 0033298625
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-557-127 Document Type: Article |
Times cited : (3)
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References (11)
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