Newly developed low-density methylsiloxane spin-on-glass films

Materials Research Society Symposium - Proceedings

Volumn 565, Issue , 1999, Pages 279-284

  Yamada, Noriko ^a   Takahashi, Toru ^a  

^a NIPPON STEEL CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CURING; DENSITY (SPECIFIC GRAVITY); DIELECTRIC MATERIALS; PERMITTIVITY; PYROLYSIS; SILANES; SURFACE PROPERTIES; THERMODYNAMIC STABILITY;

INTERLAYER DIELECTRIC; METHYLSILOXANE; SPIN-ON GLASS; SURFACE AREA;

SEMICONDUCTING FILMS;

EID: 0033297419     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-565-279     Document Type: Article

References (6)

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