Fabrication and electron transport in multilayer silicon-insulator-silicon nanopillars

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 6, 1999, Pages 3235-3238

  Pooley, David M ^a   Ahmed, Haroon ^a   Lloyd, Neil S ^b  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033268926     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.591136     Document Type: Article

References (8)

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