Fabrication of silicon nanopillars containing polycrystalline silicon/insulator multilayer structures

Applied Physics Letters

Volumn 70, Issue 3, 1997, Pages 333-335

  Fukuda, Hiroshi ^a   Hoyt, J L ^b   McCord, M A ^b   Pease, R F W ^b  

^a HITACHI LTD   (Japan)

^b STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000198978     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.118387     Document Type: Article

References (6)

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