Microstructure of concentric ring patterns on Ta/Si(100)

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 6, 1999, Pages 2565-2569

  Sheng, H Y ^a   Fujita, D ^a   Dong, Z C ^a   Okamoto, H ^a   Ohgi, T ^a   Nejoh, H ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033260750     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.591128     Document Type: Article

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