Routes of metal oxide formation from metal β-diketonates used as CVD precursors

Journal De Physique. IV : JP

Volumn 9 I, Issue 8, 1999, Pages

  Turgambaeva, A E ^a   Krisyuk, V V ^a   Bykov, A F ^a   Igumenov, I K ^a  

^a NIKOLAEV INSTITUTE OF INORGANIC CHEMISTRY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; MASS SPECTROMETRY; METALS; MOLECULAR DYNAMICS; OXYGEN; PYROLYSIS; SURFACES; THERMODYNAMIC STABILITY;

COLLISION FREE HETEROGENOUS PROCESS; DIKETONATES; INTERMOLECULAR INTERACTIONS; METAL OXIDE;

OXIDES;

EID: 0033188009     PISSN: 11554339     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1051/jp4:1999808     Document Type: Article

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