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Volumn 9 I, Issue 8, 1999, Pages
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Microstructure and deposition characteristics of κ-Al2O3
a a
a
SECO TOOLS AB
(Sweden)
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Author keywords
[No Author keywords available]
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Indexed keywords
ALUMINA;
CATALYSIS;
CHEMICAL VAPOR DEPOSITION;
CRYSTAL GROWTH;
CRYSTAL MICROSTRUCTURE;
DOPING (ADDITIVES);
HYDROGEN SULFIDE;
MULTILAYERS;
PRESSURE EFFECTS;
SCANNING ELECTRON MICROSCOPY;
TITANIUM NITRIDE;
TRANSMISSION ELECTRON MICROSCOPY;
CRYSTALLINITY;
HOT WALL REACTOR;
COATINGS;
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EID: 0033188007
PISSN: 11554339
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1051/jp4:1999843 Document Type: Article |
Times cited : (1)
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References (24)
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