Low-temperature MOCVD of molybdenum sulfide on silicon and 100Cr6 steel substrates

Journal De Physique. IV : JP

Volumn 9 pt 2, Issue 8, 1999, Pages

  Senocq, F ^a   Bezombes, L ^a   Gleizes, A ^a   Garcia, J A ^b   Rodriguez, R J ^b  

^a CNRS   (France)

^b AIN   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC HUMIDITY; FILM GROWTH; FRICTION; LOW TEMPERATURE EFFECTS; MATERIALS TESTING; METALLORGANIC CHEMICAL VAPOR DEPOSITION; SILICON; STEEL; THIN FILMS;

FRICTION TESTING; MOLAR FRACTION; MOLYBDENUM SULFIDE;

MOLYBDENUM COMPOUNDS;

EID: 0033187917     PISSN: 11554339     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1051/jp4:1999880     Document Type: Article

References (16)

1. Tributsch H., Ber. Bunsenges. Phys. Chem., 81 (1977) 361-368.
2. Tributsch H., J. Electrochem. Soc., 125 (1978) 1087-1092.
3. Gabano J.P., Lithium batteries (Academic Press, London, 1983).
4. Imashi N., Kanamura K. & Takehara Z., J. Electrochem. Soc., 139 (1992) 2082-2087.
5. Fleiscauer P.D., Lince J.R., Bertrand P.A. & Bauer R.; Langmuir, 5 (1989) 1009-1015.
6. Singer I.L., Mater. Res. Soc. Symp. Proc., 140 (1989) 215.
7. Slinley H.E., Tribol. Int., 15 (1982) 303-315.
8. Spalvin T., Thin Solid Films, 96 (1982) 17-24.
9. Lee W.Y., Besmann T.M. & Scott M.W., J. Mat. Res., 9 (1994) 1474-1483.
10. Hofmann W.K.; J. Mater. Sci., 23 (1988) 3981-3986.
11. Cheon J., Gozum J.E. & Girolami G.S., Chem. Mater., 9 (1997) 1847-1853.
12. Kaplan L.H. & d'Heurle F.M.; J. Electrochem. Soc., 117 (1970) 693-700.
13. Maruyama T. & Kanagawa T., J. Electrochem. Soc., 142 (1995) 1644-1647.
14. Lander J.J. & Germer L.H., Trans. Met. Soc., AIME, 175 (1948) 648-689.
15. Fau-Canillac F. & Maury F., Surface and Coating Technology, 64 (1994) 21-27.
16. Garcia J.A. & Rodriguez R.J., private communication.