|
Volumn 38, Issue 8 B, 1999, Pages 4905-4909
|
Oxygen microwave plasma density enhancement by surface waves with a high-permittivity material window
|
Author keywords
High density plasma; Large diameter plasma; Oxygen plasma for ULSI processes; Permittivity of the dielectric window; Surface wave plasma
|
Indexed keywords
ALUMINA;
CARRIER CONCENTRATION;
DIELECTRIC MATERIALS;
MAGNETIC FIELD MEASUREMENT;
MICROWAVES;
OXYGEN;
PERMITTIVITY;
PRESSURE MEASUREMENT;
QUARTZ APPLICATIONS;
SURFACE WAVES;
TEMPERATURE MEASUREMENT;
ULSI CIRCUITS;
LARGE DIAMETER PLASMA;
OXYGEN PLASMA;
SURFACE WAVE PLASMA;
PLASMA DENSITY;
|
EID: 0033173972
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/jjap.38.4905 Document Type: Article |
Times cited : (7)
|
References (4)
|