Preparation of thermosensitive magnetron sputtered thin films

Vacuum

Volumn 53, Issue 1-2, 1999, Pages 47-52

  Beensh Marchwicka, G ^a   Prociow E ^a   Posadowski, W ^a  

^a WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; CHEMICAL VAPOR DEPOSITION; ELECTRIC PROPERTIES; MAGNETRON SPUTTERING; SEEBECK EFFECT; SEMICONDUCTING GERMANIUM; SEMICONDUCTING SILICON; SEMICONDUCTOR MATERIALS; TEMPERATURE; THERMAL CONDUCTIVITY OF SOLIDS; THERMISTORS; THERMODYNAMIC STABILITY;

MAGNETRON POWER SUPPLY; TEMPERATURE COEFFICIENT OF RESISTANCE; THERMOSENSITIVITY;

THIN FILMS;

EID: 0033133153     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(98)00420-5     Document Type: Article

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