Measurement of outgassing characteristics from a vacuum chamber fabricated for pressure calibration in UHV/XHV region

Vacuum

Volumn 53, Issue 1-2, 1999, Pages 291-294

  Ichimura, Shingo ^a   Kokubun, Kiyohide ^a   Hirata, Masahiro ^a   Tsukahara, Sonoko ^b   Saito, Kzuya ^b   Ikeda, Yoshinao ^b  

^a ELECTROTECHNICAL LABORATORY   (Japan)

^b ULVAC INC   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS; DEGASSING; ELECTROLYTIC POLISHING; PRESSURE MEASUREMENT; SURFACE TREATMENT; TITANIUM NITRIDE;

PRE BAKING; ULTRAHIGH VACUUM;

VACUUM GAGES;

EID: 0033131192     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(98)00373-X     Document Type: Article

References (4)

1. Kokubun K, Sekine S, Ichimura S, Kurokawa A, Shimizu H. Vacuum 1996;47:557.
2. Ichimura S, Kokubun K, Shimizu H, Sekine S. Vacuum 1996; 47:545.
3. Saito K, Sato Y, Inayoshi S, Yang Y, Tsukahara S. J Vac Soc Japan 1995;38:449 (in Japanese).
4. Saito K, Inayoshi S, Ikeda Y, Yang Y, Tsukahara S. J Vac Sci Technol 1995;A13:556.