Pressure measurement of 10-10 to 10-12 Pa by nonresonant multiphoton ionization

Vacuum

Volumn 47, Issue 6-8, 1996, Pages 557-559

  Kokubun, K ^a   Sekine, S ^a   Ichimura, S ^a   Kurokawa, A ^a   Shimizu, H ^a  

^a ELECTROTECHNICAL LABORATORY   (Japan)

Author keywords

Extreme high vacuum; H2; Ion detection efficiency; Nonresonant multiphoton ionization; Pressure measurement; Xe

Indexed keywords

HYDRIDES; IONIZATION OF GASES; IONS; PARTICLE DETECTORS; PHOTONS; VACUUM TECHNOLOGY; XENON;

EXTREME HIGH VACUUM; INCIDENT ION ENERGY; ION DETECTION EFFICIENCY; ION DETECTION HEAD; NONRESONANT MULTIPHOTON IONIZATION;

PRESSURE MEASUREMENT;

EID: 0030172904     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0042-207x(96)00019-x     Document Type: Article

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