Three-dimensional micro-structures for the embedding of living cells

Microelectronic Engineering

Volumn 46, Issue 1, 1999, Pages 409-412

  Otte, K ^a   Zimmer, K ^a   Zeitschel, U ^b   Braun, A ^a   Hirsch, D ^a   Bigl, F ^a   Bigl, V ^b  

^a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

^b UNIVERSITY OF LEIPZIG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CELL MEMBRANES; ELECTRON BEAM LITHOGRAPHY; MICROSTRUCTURE; QUARTZ; REACTIVE ION ETCHING; SEMICONDUCTING SILICON; SILICA;

WET ETCHING;

MICROELECTRONIC PROCESSING;

EID: 0033130740     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(99)00121-5     Document Type: Article

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