Thin film vertical diffraction gratings fabricated using glancing angle deposition

Electronics Letters

Volumn 35, Issue 6, 1999, Pages 491-493

  Elezzabi, A Y ^a   Sit, J C ^a   Holzman, J F ^a   Robbie, K ^a   Brett, M J ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED OPTOELECTRONICS; LIGHT POLARIZATION; SILICON COMPOUNDS; SUBSTRATES; THIN FILMS; WAVELENGTH DIVISION MULTIPLEXING;

GLANCING ANGLE DEPOSITION; INTEGRATED PHOTONIC DEVICES; SILICON OXIDE;

DIFFRACTION GRATINGS;

EID: 0033101271     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:19990340     Document Type: Article

References (12)

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