Planarized Copper Gate Hydrogenated Amorphous-Silicon Thin-Film Transistors for AM-LCD's

IEEE Electron Device Letters

Volumn 20, Issue 3, 1999, Pages 129-131

  Lan, Je Hsiung ^a   Kanicki, Jerzy ^a  

^a University of Michigan   (United States)

Author keywords

AM LCD; Amorphous semiconductors devices; Planarization; Thin film transistors

Indexed keywords

AMORPHOUS SILICON; COPPER; HYDROGENATION; LIQUID CRYSTAL DISPLAYS;

PLANARIZED COPPER GATES;

THIN FILM TRANSISTORS;

EID: 0033098896     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/55.748910     Document Type: Article

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