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Volumn 112, Issue 1-3, 1999, Pages 245-249

Plasma cleaning of copper leadframe with Ar and Ar/H2 gases

Author keywords

Adhesion; Leadframe; Package; Plasma cleaning

Indexed keywords

ADHESION; ARGON; BOND STRENGTH (MATERIALS); HYDROGEN; METAL CLEANING; METAL MOLDING; METAL TESTING; OXIDATION; PLASMA APPLICATIONS;

EID: 0033077681     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(98)00779-8     Document Type: Article
Times cited : (48)

References (8)
  • 5
    • 0041134256 scopus 로고    scopus 로고
    • Semicon 96
    • Singapore, Semiconductor Equipment and Materials International, Mountain View, CA
    • N. Onda, A. Dommann, H. Zimmermann, J. Ramm, Semicon 96, Technical Conf. Proc., Singapore, Semiconductor Equipment and Materials International, Mountain View, CA, 1996.
    • (1996) Technical Conf. Proc.
    • Onda, N.1    Dommann, A.2    Zimmermann, H.3    Ramm, J.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.