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Volumn 112, Issue 1-3, 1999, Pages 210-216
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PVD and ECD-competition, alternative or combination?
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Author keywords
Coating process combination; Coating process selection; ECD; PVD
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Indexed keywords
ELECTRODEPOSITION;
HAZARDOUS MATERIALS;
PLASMA APPLICATIONS;
SUBSTRATES;
SURFACE ROUGHNESS;
VACUUM TECHNOLOGY;
VAPOR DEPOSITION;
WASTEWATER;
PHYSICAL VAPOR DEPOSITION (PVD);
COATING TECHNIQUES;
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EID: 0033076453
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(98)00750-6 Document Type: Article |
Times cited : (12)
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References (25)
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