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Volumn 112, Issue 1-3, 1999, Pages 210-216

PVD and ECD-competition, alternative or combination?

Author keywords

Coating process combination; Coating process selection; ECD; PVD

Indexed keywords

ELECTRODEPOSITION; HAZARDOUS MATERIALS; PLASMA APPLICATIONS; SUBSTRATES; SURFACE ROUGHNESS; VACUUM TECHNOLOGY; VAPOR DEPOSITION; WASTEWATER;

EID: 0033076453     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(98)00750-6     Document Type: Article
Times cited : (12)

References (25)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.