|
Volumn 32, Issue 4, 1999, Pages 388-394
|
Depth profiling of inhomogeneous zirconia films by optical and Rutherford backscattering spectrometric techniques
|
Author keywords
[No Author keywords available]
|
Indexed keywords
DENSITY (SPECIFIC GRAVITY);
EVAPORATION;
REFLECTOMETERS;
REFRACTIVE INDEX;
RUTHERFORD BACKSCATTERING SPECTROSCOPY;
SPECTROPHOTOMETERS;
SUBSTRATES;
THERMAL EFFECTS;
ZIRCONIA;
THIN FILMS;
COLUMNAR STRUCTURE;
INHOMOGENEOUS ZIRCONIA FILMS;
OPTICAL INHOMOGENEITY;
OPTICAL SPECTROSCOPY;
TRANSMITTANCE;
TRANSPARENT SUBSTRATE;
DEPTH PROFILING;
THIN FILMS;
ZIRCONIA;
|
EID: 0033068261
PISSN: 00223727
EISSN: None
Source Type: Journal
DOI: 10.1088/0022-3727/32/4/006 Document Type: Article |
Times cited : (10)
|
References (14)
|