Analyses of composition and chemical shift of silicon oxynitride film using energy-filtering transmission electron microscope based spatially resolved electron energy loss spectroscopy

Micron

Volumn 30, Issue 2, 1999, Pages 121-127

  Kimoto, K ^a   Kobayashi, K ^a   Aoyama, T ^a   Mitsui, Y ^a  

^a HITACHI LTD   (Japan)

Author keywords

Chemical shift; Electron energy loss spectroscopy (EELS); Energy filtering transmission electron microscope; Silicon oxynitride; Spatially resolved EELS

Indexed keywords

EID: 0033033816     PISSN: 09684328     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0968-4328(99)00023-2     Document Type: Conference Paper

References (14)

1. Batson P.E. Conduction bandstructure in strained silicon by spatially resolved electron energy loss spectroscopy. Ultramicroscopy. 59:1995;63-70.
2. Batson P.E., Silcox J. Experimental energy-loss function Im[-1/ε(q,ω) for aluminum. Phys. Rev. B. 27:1983;5224-5239.
3. Bruley J., Tanaka I., Kleebe H.-J., Rühle M. Chemistry of grain boundaries in calcia doped silicon nitride studied by spatially resolved electron energy-loss spectroscopy. Analytica Chimica Acta. 297:1994;97-108.
4. Colliex C. New trends in STEM-based nano-EELS analysis. J. Electron Microsc. 45:1996;44-50.
5. Egerton R.F. Electron Energy-loss Spectroscopy in the Electron Microscope. 1986;Plenum Press, New York.
6. Kimoto K., Sekiguchi T., Aoyama T. Chemical shift mapping of Si L and K edges using spatially resolved EELS and energy-filtering TEM. J. Electron Microsc. 46:1997;369-374.
7. Kobayashi K., Tago K., Kurita N. Efficient direct self-consistent-field method in density-functional theory. Phys. Rev. A. 53:1996;1903-1906.
8. Midgley P.A., Saunders M., Vincent R., Steeds J.W. Energy-filtered convergent-beam diffraction: example and future prospects. Ultramicroscopy. 59:1995;1-13.
9. Reimer L. Energy-Filtering Transmission Electron Microscopy. 1995;Springer, Berlin.
10. Reimer L., Fromm I., Hirsch P., Plate U., Rennekamp R. Combination of EELS modes and electron spectroscopic imaging and diffraction in an energy-filtering electron microscope. Ultramicroscopy. 46:1992;335-347.
11. Sekiguchi T., Kimoto K., Aoyama T., Mitsui Y. Nitrogen distribution and chemical bonding state analyses in oxynitride film by spatially resolved electron energy loss spectroscopy. Jpn. J. Appl. Phys. 37:1998;L694-L696.
12. Tanaka I., Kawai J., Adachi H. Near-edge X-ray-absorption fine structure of crystalline silicon dioxides. Phys. Rev. B. 52:1995;11 733-11 739.
13. Watanabe H. Experimental evidence for the collective nature of the characteristic energy loss of electrons in solids. J. Phys. Soc. Jpn. 11:1956;112-119.
14. Williams D.B., Edington J.W. High resolution microanalysis in materials science using electron energy loss measurements. J. Microsc. 108:1976;113-145.