Evaluating reusable HDPE containers for delivery of high-purity hydrofluoric acid

MICRO

Volumn 15, Issue 7, 1997, Pages 95-100

  Talasek, R Thomas ^a,b,c   Hunt, Brian K ^a,b   Cooke, David C ^a,b  

^a General Chemical   (United States)

^b General Chemical's Electronic Chemicals Group   (United States)

^c SEMI Process Chemicals Guidelines Subcommittee   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONTAINERS; CONTAMINATION; FILM GROWTH; HIGH DENSITY POLYETHYLENES; HYDROFLUORIC ACID; IMPURITIES; MASS SPECTROMETRY; NUCLEATION; STACKING FAULTS; SURFACE CLEANING; SURFACE ROUGHNESS;

METALLIC IMPURITY; PARTICULATE IMPURITY; SURFACE MICROROUGHNESS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0031187524     PISSN: 10810595     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Review

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