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Volumn 171, Issue 1, 1999, Pages 203-207
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Influence of dislocations on nitrogen-oxygen complex in silicon
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Author keywords
[No Author keywords available]
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Indexed keywords
ANNEALING;
COMPLEXATION;
CRYSTAL GROWTH FROM MELT;
CRYSTAL ORIENTATION;
DISLOCATIONS (CRYSTALS);
NITROGEN;
OXYGEN;
REACTION KINETICS;
SEMICONDUCTOR DOPING;
NITROGEN-DOPED CZOCHRALSKI (NCZ) SILICON;
SEMICONDUCTING SILICON;
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EID: 0032734755
PISSN: 00318965
EISSN: None
Source Type: Journal
DOI: 10.1002/(SICI)1521-396X(199901)171:1<203::AID-PSSA203>3.0.CO;2-L Document Type: Article |
Times cited : (2)
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References (12)
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