Xenon-ion-beam modifications of a-SiO2 and Ni/a-SiO2 layers

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 147, Issue 1-4, 1999, Pages 238-243

  Schwickert, M ^a   Lieb, K P ^a   Bolse, W ^a,c   Gustafsson, M ^b   Keinonen, J ^b  

^a UNIVERSITY OF GÖTTINGEN   (Germany)

^b UNIVERSITY OF HELSINKI   (Finland)

^c UNIVERSITY OF STUTTGART   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; ANNEALING; INTERFACES (MATERIALS); ION BOMBARDMENT; MORPHOLOGY; NICKEL; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICA; SPUTTERING; SURFACE ROUGHNESS; XENON;

ION BEAM MIXING; ION BEAM MODIFICATION; SURFACE PROFILOMETRY; SURFACE ROUGHENING;

ION IMPLANTATION;

EID: 0032714985     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)00536-9     Document Type: Article

References (22)

1. W. Bolse, Mater. Sci. Eng. R 12 (1994) 53.
2. W. Bolse, S.D. Peteves, Nucl. Instr. and Meth. B 68 (1992) 331.
3. F. Harbsmeier, W. Bolse, J. Appl. Phys. 83 (1998) 4049.
4. M. Uhrmacher, K.P. Lieb, Nucl. Instr. and Meth. B 68 (1992) 175.
5. J. Conrad et al., Phys. Rev. B (1998) submitted.
6. T. Corts, A. Traverse, W. Bolse, Nucl. Instr. Meth. B 80/ 81 (1993) 167; J. Sun, W. Bolse, K.P. Lieb, A. Traverse, Mater. Sci. Eng. A 196 (1995) 529.
7. T. Corts, A. Traverse, W. Bolse, Nucl. Instr. Meth. B 80/ 81 (1993) 167; J. Sun, W. Bolse, K.P. Lieb, A. Traverse, Mater. Sci. Eng. A 196 (1995) 529.
8. K.P. Lieb, W. Bolse, M. Uhrmacher, Nucl. Instr. and Meth. B 89 (1994) 277.
9. P. Haussalo et al., Nucl. Instr. and Meth. B 120 (1996) 266.
10. K.P. Lieb et al., Thin Solid Films 302 (1997) 162.
11. F. Roccaforte, W. Bolse, K.P. Lieb, Appl. Phys. Lett., submitted.
12. M. Uhrmacher et al., Nucl. Instr. and Meth. B 9 (1985) 234.
13. L.R. Doolittle, Nucl. Instr. and Meth. B 15 (1986) 227.
14. J.F. Ziegler, J.P. Biersack, U. Littmark, The Stopping and Range of Ions in Solids, vol. 1, Pergamon Press, New York, 1985.
15. N. Matsunami et al., At. Data Nucl. Data Tabl. 31 (1984) 1.
16. J.P. Biersack, program TRIM95, private communication.
17. T.K.S. Wong, I.H. Wilson, Nucl. Instr. and Meth. B 91 (1994) 639.
18. P. Sigmund, A. Gras-Marti, Nucl. Instr. and Meth. 182/ 183 (1981) 25.
19. W. Müller et al., Appl. Phys. A 54 (1992) 84.
20. W. Bolse, T. Weber, Nucl. Instr. and Meth. B 85 (1994) 188.
21. W. Bolse, Nucl. Instr. and Meth. B 80/81 (1993) 137.
22. W.H. Wang et al., Thin Solid Films 295 (1997) 169.