Studies of Na-irradiated Ni/Si bilayers: Na migration and NiSi formation

Thin Solid Films

Volumn 302, Issue 1-2, 1997, Pages 162-168

  Lieb, K P ^a   Haussalo, P ^b   Bolse, W ^a   Illgner, C ^a   Keinonen, J ^b   Niederdrenk, M ^a  

^a UNIVERSITY OF GÖTTINGEN   (Germany)

^b UNIVERSITY OF HELSINKI   (Finland)

Author keywords

Interfaces; Ion bombardment; Nuclear reaction analysis (nra); Rutherford backscattering spectroscopy

Indexed keywords

HEAT TREATMENT; ION BEAMS; ION BOMBARDMENT; ION IMPLANTATION; NICKEL; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON; SODIUM;

BILAYERS; RESONANT NUCLEAR REACTION ANALYSIS (RNRA);

INTERFACES (MATERIALS);

EID: 0031166211     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00020-5     Document Type: Article

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