Monohydride clustering in the amorphous silicon matrix

Journal of Non-Crystalline Solids

Volumn 246, Issue 1, 1999, Pages 65-72

  Sidhu, L S ^a   Zukotynski, S ^a  

^a UNIVERSITY OF TORONTO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; HYDROGEN; HYDROGEN BONDS; INFRARED SPECTROSCOPY; ORGANIC COMPOUNDS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SUBSTRATES;

AMORPHOUS SILICON MATRIX; DECONVOLUTION; DIHYDRIDE; FREQUENCY STRETCHING MODE BAND; GAUSSIAN FUNCTIONS; MONOHYDRIDE CLUSTERING;

AMORPHOUS FILMS;

EID: 0032691657     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(99)00018-6     Document Type: Article

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