Direct bonding between quaternary compound semiconductor and garnet crystals for integrated optical isolator

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 38, Issue 1, 1999, Pages 195-197

  Yokoi, Hideki ^a   Mizumoto, Tetsuya ^a   Shimizu, Masafumi ^a   Futakuchi, Naoki ^b   Kaida, Noriaki ^b   Nakano, Yoshiaki ^b  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b UNIVERSITY OF TOKYO   (Japan)

Author keywords

Magnetic garnets; Optical isolator; SEM; Semiconductor; Wafer direct bonding

Indexed keywords

BONDING; GARNETS; HEAT TREATMENT; INTEGRATED OPTICS; MAGNETOOPTICAL DEVICES; OPTICAL WAVEGUIDES; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING GALLIUM COMPOUNDS; SEMICONDUCTING INDIUM PHOSPHIDE;

INTEGRATED OPTICAL ISOLATOR; WAFER DIRECT BONDING;

CRYSTALS;

EID: 0032686586     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.38.195     Document Type: Article

References (5)

1. Y. H. Lo, R. Bhat, D. M. Hwang, C. Chua and C.-H. Lin: Appl. Phys. Lett. 62 (1993) 1038.
2. H. Wada, Y. Ogawa and T. Kamijoh: Appl. Phys. Lett. 62 (1993) 738.
3. M. Totoki, T. Mizumoto, K. Maru and Y. Naito: Electron. Lett. 30 (1994) 1534.
4. H. Yokoi, T. Mizumoto, K. Maru and Y. Naito: Electron. Lett. 31 (1995) 1612.
5. H. Yokoi, T. Mizumoto, K. Maru and Y. Naito: Jpn. J. Appl. Phys. 35 (1996) 4138.