Direct bonding between InP substrate and magnetooptic waveguides

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 35, Issue 7, 1996, Pages 4138-4140

  Yokoi, Hideki ^a   Mizumoto, Tetsuya ^a   Maru, Koichi ^a   Fuke, Nobutaka ^a   Naito, Yoshiyuki ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Direct bonding; Garnets; InP; Rib waveguide; SEM

Indexed keywords

BONDING; CHEMICAL OPERATIONS; DISKS (STRUCTURAL COMPONENTS); INDIUM; PHOSPHORUS; TECHNOLOGY; WAVEGUIDE COUPLERS;

DIRECT BONDING; MAGNETOOPTIC WAVEGUIDES; RIB WAVEGUIDES;

MAGNETOOPTICAL DEVICES;

EID: 0030193689     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.35.4138     Document Type: Article

References (9)

1. Y. H. Lo, R. Bhat, D. M. Hwang, C. Chua and C.-H. Lin: Appl. Phys. Lett. 62 (1993) 1038.
2. H. Wada, Y. Ogawa and T. Kamijoh: Appl. Phys. Lett. 62 (1993) 738.
3. M. Totoki, T. Mizumoto, K. Maru and Y. Naito: Electron. Lett. 30 (1994) 1534.
4. M. Totoki, T. Mizumoto, T. Nakamura, K. Maru and Y. Naito: Jpn. J. Appl. Phys. 34 (1995) 510.
5. H. Yokoi, T. Mizumoto, K. Maru and Y. Naito: Electron. Lett. 31 (1995) 1612.
6. W. Kern and D. A. Puotinen: RCA Rev. 31 (1970) 187.
7. J. Haisma, B. A. C. M. Spierings, U. K. P. Biermann and A. A. van Gorkum: Appl. Opt. 33 (1994) 1154.
8. T. R. Chen, L. C. Chiu, A. Hasson, K. L. Yu, S. Margalit and A. Yariv: J. Appl. Phys. 54 (1983) 2407.
9. Z. L. Liau, J. N. Walpole and D. Z. Tsang: IEEE J. Quantum Electron. 20 (1984) 855.