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Volumn 69, Issue , 1999, Pages 539-544

Identification of process induced defects in silicon power devices

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDS; CRYSTAL DEFECTS; DEEP LEVEL TRANSIENT SPECTROSCOPY; DIFFUSION IN SOLIDS; ENERGY GAP; HEAT TREATMENT; HOLE TRAPS; IMPURITIES; IONIZATION OF SOLIDS; SEMICONDUCTOR JUNCTIONS;

EID: 0032685543     PISSN: 10120394     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.4028/www.scientific.net/ssp.69-70.539     Document Type: Article
Times cited : (7)

References (19)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.