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Volumn 568, Issue , 1999, Pages 277-281
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Nitrogen implantation and diffusion in silicon
a a b a b b b b b b b a b b b
b
IBM
(United States)
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Author keywords
[No Author keywords available]
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Indexed keywords
AMORPHIZATION;
ANNEALING;
DIFFUSION IN SOLIDS;
ION IMPLANTATION;
NITROGEN;
SILICON WAFERS;
SUB-AMORPHIZING DOSES;
SEMICONDUCTING SILICON;
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EID: 0032685411
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-568-277 Document Type: Article |
Times cited : (5)
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References (7)
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