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Volumn 568, Issue , 1999, Pages 277-281

Nitrogen implantation and diffusion in silicon

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHIZATION; ANNEALING; DIFFUSION IN SOLIDS; ION IMPLANTATION; NITROGEN; SILICON WAFERS;

EID: 0032685411     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-568-277     Document Type: Article
Times cited : (5)

References (7)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.