Increased-area oxidised single-fundamental mode VCSEL with self-aligned shallow etched surface relief

Electronics Letters

Volumn 35, Issue 16, 1999, Pages 1340-1341

  Unold, H J ^a   Grabherr, M ^a   Eberhard, F ^a   Mederer, F ^a   Jager R ^a   Riedl, M ^a   Ebeling, K J ^a  

^a UNIVERSITY OF ULM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CAVITY RESONATORS; ELECTRIC CURRENTS; ELECTRON DEVICE MANUFACTURE; ELECTROOPTICAL EFFECTS; ETCHING; LASER MODES; LIGHT EMISSION; OXIDES; SURFACE PHENOMENA;

SELF ALIGNING FABRICATION PROCESS; SINGLEMODE EMISSION; SURFACE RELIEF ETCHING; THRESHOLD GAIN; VERTICAL CAVITY SURFACE EMITTING LASERS;

SEMICONDUCTOR LASERS;

EID: 0032680412     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:19990952     Document Type: Article

References (5)

1. CROQUETTE, K.D., and HOU, H.Q.: 'Vertical-cavity surface emitting lasers: Moving from research to manufacturing', Proc. IEEE. 1997, 85, (11), pp. 1730-1739
2. THORNTON, R.L.: 'Vertical cavity lasers and their application to laser printing'. Proc. SPIE, 1997, Vol. 3003, pp. 112-119
3. MANSURIPUR, M., and SINCERBOX, o.: 'Principles and techniques of optical data storage', Proc. IEEE, 1997, 85, (11), pp. 1780-1796
4. JUNO. C, JAGER, R., GRABHERR, M., SCHNITZER, P., MICHALZIK, R., WEIGL, B., MüLLER, S., and EBELING, K.J.: '4.8 mW singlemode oxide confined top-surface emitting vertical-cavity laser diode', Electron. Lett., 1997, 33, pp. 1790-1791
5. MARTINSSON, H., VUKUSIC, J.A., GRABHERR, M., MICHALZIK, R., JäGER, R., EBELING, K.J., and LARSSON, A.: 'Transverse mode selection in large area oxide-confined vertical-cavity surfaceemitting lasers using a shallow surface relief, IEEE Photonics Technol. Lett., 1999, 11,