Tribological and optical properties of hydrogen-free amorphous carbon films with varying sp3/sp2 composition

Surface and Interface Analysis

Volumn 28, Issue 1, 1999, Pages 226-230

  Tay, B K ^a   Shi, X ^a   Liu, E ^a   Tan, H S ^a   Cheah, L K ^a   Shi, J ^a   Lim, E C ^a   Lee, H Y ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; COMPRESSIVE STRESS; DENSITY (OPTICAL); ENERGY GAP; FRICTION; SILICON WAFERS; SUBSTRATES; TRIBOLOGY;

AMORPHOUS CARBON FILMS; CATHODIC ARC;

AMORPHOUS FILMS;

EID: 0032679833     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1096-9918(199908)28:1<226::AID-SIA582>3.0.CO;2-T     Document Type: Article

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