Elastic scattering of Si 2p photoelectrons in silicon oxide

Applied Surface Science

Volumn 144-145, Issue , 1999, Pages 297-300

  Hattori, T ^a   Hirose, K ^b   Nohira, H ^a   Takahashi, K ^a   Yagi, T ^a  

^a TOKYO CITY UNIVERSITY   (Japan)

^b JAPAN AEROSPACE EXPLORATION AGENCY   (Japan)

Author keywords

Elastic scattering; Si 2p photoelectrons; Silicon oxide

Indexed keywords

ELECTRON DIFFRACTION; ELECTRON SCATTERING; ELECTRONIC STRUCTURE; HYDROGEN; MONTE CARLO METHODS; OXIDATION; SILICA; SINGLE CRYSTALS; SUBSTRATES;

ELASTIC SCATTERING; HYDROGEN TERMINATED SILICON SUBSTRATE; OXIDATION INDUCED CHANGES; PHOTOELECTRONS;

SILICON;

EID: 0032679064     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(98)00813-7     Document Type: Article

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