Synthetic single-crystal, homoepitaxially grown, CVD diamond capacitor

Journal of Materials Science: Materials in Electronics

Volumn 8, Issue 2, 1997, Pages 69-72

  Ramesham, R ^b   Pehrsson, P E ^a   Smith, T I ^b   Rose, M F ^b  

^a NAVAL RESEARCH LABORATORY   (United States)

^b AUBURN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CAPACITANCE; CAPACITORS; CHEMICAL VAPOR DEPOSITION; EPITAXIAL GROWTH; ION IMPLANTATION; MAGNETRON SPUTTERING; METALLIZING; PLASMA APPLICATIONS; SINGLE CRYSTALS;

ELECTROCHEMICAL BIAS;

DIAMOND FILMS;

EID: 0031120427     PISSN: 09574522     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1018509121955     Document Type: Article

References (9)

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