Temperature measurements of metal lines under current stress by high-resolution laser probing

IEEE Transactions on Instrumentation and Measurement

Volumn 48, Issue 1, 1999, Pages 69-74

  Quintard, Véronique ^a   Dilhaire, Stefan ^a   Phan, Tam ^a   Claeys, Wilfrid ^a  

^a UNIVERSITÉ DE BORDEAUX   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; CURRENT DENSITY; ELECTRIC LINES; ELECTROMIGRATION; INTERCONNECTION NETWORKS; INTERFEROMETRY; LASER APPLICATIONS; PROBES; STRESS ANALYSIS; THERMAL CONDUCTIVITY OF SOLIDS;

METAL LINES; THERMORESISTOMETRY;

TEMPERATURE MEASUREMENT;

EID: 0032673011     PISSN: 00189456     EISSN: None     Source Type: Journal    
DOI: 10.1109/19.755063     Document Type: Article

References (9)

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