Antistatic process of dielectric thin films using low pressure discharge plasma

Journal of Electrostatics

Volumn 46, Issue 2-3, 1999, Pages 193-206

  Takashima, Kazunori ^a   Oda, Tetsuji ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CORONA; ELECTRIC CURRENT MEASUREMENT; ELECTRIC SPACE CHARGE; NITROGEN; PLASMAS; POLYETHYLENES; POLYPROPYLENES; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

ANTISTATIC PROCESS; LOW PRESSURE DISCHARGE PLASMA; THERMALLY STIMULATED DISCHARGE CURRENT;

DIELECTRIC FILMS;

EID: 0032668878     PISSN: 03043886     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3886(99)00014-5     Document Type: Article

References (4)

1. [1] Yuichi Matsuda and Yuji Murata, "Change in Charging Characteristics of High Polymers by Plasma Treatment", Conference Record of the 1996 IEEE/IAS Annual Meeting, pp.1959, (1996)
2. [2] Kazunori Takashima and Tetsuji Oda, "Space and Surface Charge Behavior Analysis of Plasma Pre-processed Dielectric Thin Films", Conference Record of the 1997 IEEE/IAS Annual Meeting, pp.2052, (1997)
3. [3] T. Oda, S. Masuda and T. Fujita, "TSDC Measurement of Fly Ashes from Pulverized Coal Combustion", Proc. 2nd Int. Conf. on Electrostatic Precipitation, Kyoto, pp.540(1985)
4. [4] D.K. Clard and A. Dilks, "ESCA applied to Polymers: XXIII", J.Polymer Sci., 17, 957(1979)